Properties of Sr(La0.93Nd0.07)4Ti4O15 Dielectric Thin Films by Sol-Gel Method

被引：0

作者：

Yang, Yu-Hang ^{[1
]}

Chen, Wen-Shiush ^{[1
]}

Liu, Jen-Chieh ^{[1
]}

Hsu, Cheng-Hsing ^{[1
]}

机构：

[1] Natl United Univ, Dept Elect Engn, 2 Lien Da, Nan Shih Li 36063, Miao Li, Taiwan

来源：

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2016年 / 16卷 / 12期

关键词：

Sr(La0.93Nd0.07)(4)Ti4O15 Thin Film; Sol-Gel Method; Electrical Properties; Microstructure; LEAKAGE CURRENTS;

D O I：

10.1166/jnn.2016.13656

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The electrical properties and microstructures of Sr(La0.93Nd0.07)(4)Ti4O15 thin films prepared by sol-gel method on n-type Si (100) substrates at different preheating and annealing temperatures have been investigated. The selected-area diffraction pattern showed that the deposited films exhibited a polycrystalline microstructure. At a preheating temperature of 500 degrees C and an annealing temperature of 800 degrees C, the Sr(La0.93Nd0.07)(4)Ti4O15 films possess a dielectric constant of 20, a dissipation factor of 0.12, and a leakage current density of 1.9x10 (8) A/cm(2) at an electrical field of 10 kV/cm.

引用

页码：12910 / 12913

页数：4

共 12 条

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