Fluorinated amorphous carbon: A low dielectric constant material for multilevel interconnect applications.

被引：0
|
作者：
Zhu, W [1 ]
Pai, CS [1 ]
Bair, HE [1 ]
Krautter, HW [1 ]
Dennis, BS [1 ]
机构：
[1] AT&T Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1999年 / 218卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
93-PMSE
引用
收藏
页码：U629 / U629
页数：1
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