共 50 条
- [3] HIGH-RESOLUTION ION-BEAM LITHOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1172 - 1175
- [5] HIGH-RESOLUTION ION-BEAM PROFILER FOR ION IMPLANTERS NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 99 (1-4): : 573 - 575
- [7] HIGH-RESOLUTION FOCUSED ION-BEAM LITHOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (05): : 2622 - 2632