A method of imaging ultrathin foils with very low energy electrons

被引：8
|
作者：
Muellerova, Ilona [1 ]
Hovorka, Milos [1 ]
Frank, Ludek [1 ]
机构：
[1] Inst Sci Instruments ASCR, Vvi, Brno 61264, Czech Republic
来源：
ULTRAMICROSCOPY | 2012年 / 119卷
关键词：
Very low energy STEM; Penetration of very slow electrons; Graphene; MICROSCOPY; RESOLUTION; EMISSION; FILMS;
D O I：
10.1016/j.ultramic.2012.01.002
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
We demonstrate the possibility to examine the free-standing foils of thicknesses in units of nm in the scanning low energy electron microscope, using both reflected and transmitted electrons. Very high contrast has been obtained in dependence on the thickness and structure of the foil. A contribution of secondary electrons to the forward scattered electron signal is discussed and a way of suppressing it is presented. Examples of reflected, total transmitted and dark field transmitted electron signal for two graphene-like samples are shown. Dependence of the transmitted signal on the electron energy is observed. (C) 2012 Published by Elsevier B.V.
引用
收藏
页码：78 / 81
页数：4
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