Detailed studies of yttrium thin films deposited by laser radiation of different pulse durations

被引：3

作者：

Miglietta, Paola ^{[2
]}

Fasano, Vito ^{[1
]}

Papadopoulou, Evie ^{[3
]}

Liu, Baoying ^{[4
]}

De Rosa, Horacio ^{[5
]}

Perrone, Alessio ^{[1
]}

机构：

[1] Univ Salento, Dept Phys, Natl Inst Nucl Phys, I-73100 Lecce, Italy

[2] Solar Construct, Dev & Res Sect, I-73020 Lecce, Italy

[3] Fdn Res & Technol Hellas FORTH, IESL, Iraklion 71119, Crete, Greece

[4] Shaanxi Vocat & Tech Coll, Xian 710100, Peoples R China

[5] Univ Buenos Aires, Fac Ingn, Dpto Ingn Mecan & Naval, Lab Metalografia, RA-1053 Buenos Aires, DF, Argentina

来源：

18TH INTERNATIONAL VACUUM CONGRESS (IVC-18) | 2012年 / 32卷

关键词：

Thin films; laser ablation; laser pulse duration; scanning electron microscopy; droplets;

D O I：

10.1016/j.phpro.2012.03.565

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Parametric studies have been performed on yttrium films deposited by laser ablation deposition at three different laser pulse durations. Morphological investigations of the film surface have confirmed the strong influence of pulse durations on the density, size and shape of the deposited droplets. The average ablation rate and deposition rate in ns regime resulted to be one order of magnitude higher than those obtained in ps and sub-ps regimes. Present interest in the deposition of Y thin films by laser ablation technique starts from the well known photoemission properties of this metal. (C) 2012 Published by Elsevier B.V. Selection and/or peer review under responsibility of Chinese Vacuum Society (CVS).

引用

页码：335 / 339

页数：5

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