Performance improvement of hybrid catalyzed SiO2 sol-gel film

被引:3
作者
Zhang, WQ [1 ]
Le, YQ [1 ]
Liu, XL [1 ]
Tang, YX [1 ]
Sun, JR [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Natl Lab High Power Laser Phys, Beijing 100864, Peoples R China
来源
ENGINEERED NANOSTRUCTURAL FILMS AND MATERIALS | 1999年 / 3790卷
关键词
SiO2; film; sol-gel; hybrid catalysis; antireflective; moisture-proof;
D O I
10.1117/12.351258
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The silca antireflective film doped PEG (polyethylene glycol) and siloxane into aged base-catalyzed colloidal SiO2, suspension has been formed. It is illustrated that its laser induced damage threshold and scratch-resistant capability have been improved, and the film can be also used for a longer time in practical applications. By means of investigation of the surface structure, transmission spectrum and laser damage threshold of the film, The role of the siloxane is analyzed.
引用
收藏
页码:235 / 240
页数:6
相关论文
共 14 条
[1]  
BELLEVILLE PF, 1994, P SOC PHOTO-OPT INS, V2288, P25, DOI 10.1117/12.188957
[2]  
BELLEVILLE PF, 1992, P SOC PHOTO-OPT INS, V1758, P40, DOI 10.1117/12.131998
[3]  
Born M., 2006, PRINCIPLES OPTICS
[4]   HYDROLYSIS AND CONDENSATION OF SILICATES - EFFECTS ON STRUCTURE [J].
BRINKER, CJ .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1988, 100 (1-3) :31-50
[5]  
FLOCH HG, 1990, AM CERAM SOC BULL, V69, P1141
[6]  
FLOCH HG, 1992, P SOC PHOTO-OPT INS, V1758, P135, DOI 10.1117/12.132008
[7]  
Kozlowski M.R., 1992, P SPIE P SPIE, V1782, P105
[8]  
MATSUDA A, 1990, SPIE, V1328, P71
[9]  
RAINER F, 1994, P SOC PHOTO-OPT INS, V2114, P9, DOI 10.1117/12.180882
[10]  
ROUX R, 1995, LASER FOCUS WORLD, V31, P53