New approach of fabrication and dispensing of micromachined cesium vapor cell

被引：40

作者：

Nieradko, Lukasz ^{[1
]}

Gorecki, Christophe ^{[1
]}

Douahi, Adel ^{[1
]}

Giordano, Vincent ^{[1
]}

Beugnot, Jean Charles ^{[1
]}

Dziuban, Jan ^{[2
]}

Moraja, Marco ^{[3
]}

机构：

[1] Inst Franche Comte Elect Mecan Therm & Opt Sci &, UMR CNRS 6174, F-25030 Besancon, France

[2] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, PL-50372 Wroclaw, Poland

[3] SAES Getters, I-20020 Milan, Italy

来源：

JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS | 2008年 / 7卷 / 03期

关键词：

microelectromechanical systems; atomic clock; anodic bonding; cesium dispenser;

D O I：

10.1117/1.2964288

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe the fabrication of wafer-scale alkali vapor cells based on silicon micromachining and anodic bonding. The principle of the proposed micromachined alkali cell is based on an extremely compact sealed vacuum cavity of a few cubic millimeters containing caesium vapors, illuminated by a high-frequency modulated laser beam. The alkali cells are formed by sealing an etched silicon wafer between two glass wafers. The technique of cell filling involves the use of an alkali dispenser. The activation of cesium vapors is made by local heating of the dispenser below temperature range causing degradations of cesium vapor purity. Thus, the procedure avoids negative effects of cesium chemistry on the quality of cell surfaces and sealing procedure. To demonstrate the clock operation, cesium absorption as well as coherent population trapping resonance was measured in the cells. (C) 2008 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.2964288]

引用

页数：6

共 10 条

[1]

[Anonymous], 2004, 36th Annual Precise Time and Time Interval

[2]

BOFFITO C, Patent No. 6753648

[3] Vapour microcell for chip scale atomic frequency standard [J].

Douahi, A. ;

Nieradko, L. ;

Beugnot, J. C. ;

Dziuban, J. ;

Maillotte, H. ;

Guerandel, S. ;

Moraja, M. ;

Gorecki, C. ;

Giordano, V. .

ELECTRONICS LETTERS, 2007, 43 (05) :279-280

[4]

DZIUBAN J, 2006, Patent No. 0609089

[5] Miniature vapor-cell atomic-frequency references [J].

Kitching, J ;

Knappe, S ;

Hollberg, L .

APPLIED PHYSICS LETTERS, 2002, 81 (03) :553-555

[6] Atomic vapor cells for chip-scale atomic clocks with improved long-term frequency stability [J].

Knappe, S ;

Gerginov, V ;

Schwindt, PDD ;

Shah, V ;

Robinson, HG ;

Hollberg, L ;

Kitching, J .

OPTICS LETTERS, 2005, 30 (18) :2351-2353

[7] Microfabricated alkali atom vapor cells [J].

Liew, LA ;

Knappe, S ;

Moreland, J ;

Robinson, H ;

Hollberg, L ;

Kitching, J .

APPLIED PHYSICS LETTERS, 2004, 84 (14) :2694-2696

[8] Wafer-level filling of microfabricated atomic vapor cells based on thin-film deposition and photolysis of cesium azide [J].

Liew, Li-Anne ;

Moreland, John ;

Gerginov, Vladislav .

APPLIED PHYSICS LETTERS, 2007, 90 (11)

[9]

Radhakrishnan S, 2005, Transducers '05, Digest of Technical Papers, Vols 1 and 2, P23

[10]

Vanier J., 1989, QUANTUM PHYS ATOMIC, V1

← 1 →