Formation mechanisms of diamond precursors during the nucleation process

被引：20
作者：
Yugo, S
Semoto, K
Nakamura, N
Kimura, T
Nakai, H
Hashimoto, M
机构：
来源：
DIAMOND AND RELATED MATERIALS | 1997年 / 6卷 / 08期
关键词：
bias; CVD; diamond; nucleation;
D O I：
10.1016/S0925-9635(97)00003-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The aim of this report is to reconsider our diamond nucleation model in light of the many reports published recently. We found that our model agrees with most of the recent reports; however, it does not agree with some of them with respect to the kinetics of nucleus formation. This disagreement stems from the question of whether or not a nucleus precursor should be treated as anembryonic cluster which is a small critical nucleus. (C) 1997 Elsevier Science S.A.
引用
收藏
页码：1047 / 1050
页数：4
相关论文
共 33 条
[1]  
ANGUS JC, 1993, 2 INT C APPL DIAM FI, P153
[2]   MODELING OF STRESS-INDUCED DIAMOND NUCLEATION [J].
DEAK, P ;
GALI, A ;
SCZIGEL, G ;
EHRHARDT, H .
DIAMOND AND RELATED MATERIALS, 1995, 4 (5-6) :706-709
[3]   EXPERIMENTAL CHARACTERIZATION OF BIAS-ENHANCED NUCLEATION OF DIAMOND ON SI [J].
GERBER, J ;
SATTEL, S ;
JUNG, K ;
EHRHARDT, H ;
ROBERTSON, J .
DIAMOND AND RELATED MATERIALS, 1995, 4 (5-6) :559-562
[4]   INVESTIGATIONS OF DIAMOND NUCLEATION ON AC FILMS GENERATED BY DC BIAS AND MICROWAVE PLASMA [J].
GERBER, J ;
WEILER, M ;
SOHR, O ;
JUNG, K ;
EHRHARDT, H .
DIAMOND AND RELATED MATERIALS, 1994, 3 (4-6) :506-509
[5]   APPROACH OF SELECTIVE NUCLEATION AND EPITAXY OF DIAMOND FILMS ON SI(100) [J].
JIANG, X ;
BOETTGER, E ;
PAUL, M ;
KLAGES, CP .
APPLIED PHYSICS LETTERS, 1994, 65 (12) :1519-1521
[6]   NUCLEATION AND INITIAL GROWTH-PHASE OF DIAMOND THIN-FILMS ON (100)-SILICON [J].
JIANG, X ;
SCHIFFMANN, K ;
KLAGES, CP .
PHYSICAL REVIEW B, 1994, 50 (12) :8402-8410
[7]  
Katsumata S., 1994, Diamond Films and Technology, V3, P199
[8]  
KOHL R, 1993, APPL PHYS LETT, V63, P1203
[9]   CHARACTERIZATION OF THE BIAS NUCLEATION PROCESS [J].
KULISCH, W ;
SOBISCH, B ;
KUHR, M ;
BECKMANN, R .
DIAMOND AND RELATED MATERIALS, 1995, 4 (04) :401-405
[10]   SUBPLANTATION MODEL FOR FILM GROWTH FROM HYPERTHERMAL SPECIES - APPLICATION TO DIAMOND [J].
LIFSHITZ, Y ;
KASI, SR ;
RABALAIS, JW .
PHYSICAL REVIEW LETTERS, 1989, 62 (11) :1290-1293
1234