Young modulus and Poisson ratio of PZT thin film by Picosecond Ultrasonics

被引：8

作者：

Casset, F. ^{[1
]}

Devos, A.

Sadtler, S.

Le Louarn, A.

Emery, P.

Le Rhun, G. ^{[1
]}

Ancey, P.

Fanget, S.

Defay, E.

机构：

[1] CEA Grenoble, LETI, F-38054 Grenoble, France

来源：

2012 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2012年

关键词：

Picosecond Ultrasonics; Young modulus; Poisson ratio; PZT;

D O I：

10.1109/ULTSYM.2012.0544

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Thin-film sol-gel Pb(Zr-0.52, Ti-0.48)O-3 (PZT) can be used in many actuator applications thanks to its high piezoelectric coefficients. The accurate knowledge of its mechanical properties such as Young modulus (E) and Poisson ratio (nu) or stiffness matrix is a key point for predictive design, whereas the state of the art reports E-PZT ranging from 70 to 139GPa. Those parameters can be accurately characterized by Picosecond Ultrasonics (PU) as detailed in this paper.

引用

收藏

页码：2180 / 2183

页数：4

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