Raman characterisation of diamond coatings using different laser wavelengths

被引:23
|
作者
Haubner, Roland [1 ]
Rudigier, Moritz [1 ]
机构
[1] Vienna Univ Technol, Inst Chem Technol & Analyt, A-1060 Vienna, Austria
来源
NINETEENTH EUROPEAN CONFERENCE ON CHEMICAL VAPOR DEPOSITION (EUROCVD 19) | 2013年 / 46卷
关键词
Diamond morphology; Raman; laser wavelength; boron doping; CVD DIAMOND; BORON INCORPORATION; BALLAS DIAMOND; SPECTROSCOPY; GROWTH; FILMS; DEPOSITION;
D O I
10.1016/j.phpro.2013.07.047
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Diamond layers can show different morphologies, i.e. well-facetted, fine-grained and ballas diamond. Additionally, the types NCD (nanocrystalline diamond), UNCD (ultra nanocrystalline diamond) and various types of amorphous carbon (a-C, a-CH center dot center dot center dot) are known. To characterise the various carbon deposits Raman spectroscopy is most common, because this technique is simple to handle. With a modern Raman spectrometer, provided with three different laser units (wavelengths 472,681 nm/blue, 532,1 nm/green, 632,81 nm/red), the same spot of a sample can be measured several times. A set of diamond coatings, representing the different morphologies, and moreover, boron doped levels were selected for Raman characterisation. Varying the laser wavelength, highly different Raman spectra were obtained and their interpretation is quite difficult. (C) 2013 The Authors. Published by Elsevier B.V.
引用
收藏
页码:71 / 78
页数:8
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