Opto-electronic humidity sensor: A review

被引:187
作者
Sikarwar, S. [1 ]
Yadav, B. C. [1 ]
机构
[1] Babasaheb Bhimrao Ambedkar Univ, Sch Phys Sci, Dept Appl Phys, Nanomat & Sensor Res Lab, Lucknow 226025, Uttar Pradesh, India
关键词
Humidity sensor; Sol-gel; Dip process; Spin coating; Opto-electronic; Fibre; ENERGY-PHYSICS APPLICATIONS; SURFACE-PLASMON RESONANCE; SCULPTURED THIN-FILMS; NANOCOMPOSITE FILM; SENSING PROPERTIES; HIGH-SENSITIVITY; FIBER; OXIDE; TEMPERATURE; FABRICATION;
D O I
10.1016/j.sna.2015.05.007
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The present paper reports the detailed study of various metal oxide nanomaterials as opto-electronic humidity sensor. The sensor elements were fabricated and characterized as thin or thick film based on the semi-conducting metal oxide. As semi-conducting metal oxides are known for their n-type conduction because of the presence of oxygen vacancies and change in refractive indices with the exposure of moisture therefore they were proven to be very good sensors for humidity. Depending upon the need, the sensing materials were deposited either on the base of the prism or on the U-shaped borosilicate glass rods or on some other transparent substrates for opto-electronic sensing. Light from LED or He-Ne laser was launched into the sensing element from one side and collected into the other side by optical power meter. The mode of propagation of light was transmission, reflection or partially refraction. Modulations in the intensity of light with changes in humidity were recorded. Being optical in nature, such types of sensors are very useful for detection of moisture level at remote places or unmanned stations. The primary purpose of this paper is to focus on the techniques used in these sensors. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:54 / 70
页数:17
相关论文
共 133 条
[1]   A humidity sensor based on a hetero-core optical fiber [J].
Akita, Shohei ;
Sasaki, Hiroyuki ;
Watanabe, Kazuhiro ;
Seiki, Atsushi .
SENSORS AND ACTUATORS B-CHEMICAL, 2010, 147 (02) :385-391
[2]   Optical fibre-based sensor technology for humidity and moisture measurement: Review of recent progress [J].
Alwis, L. ;
Sun, T. ;
Grattan, K. T. V. .
MEASUREMENT, 2013, 46 (10) :4052-4074
[3]   Fibre optic long period grating-based humidity sensor probe using a Michelson interferometric arrangement [J].
Alwis, L. ;
Sun, T. ;
Grattan, K. T. V. .
SENSORS AND ACTUATORS B-CHEMICAL, 2013, 178 :694-699
[4]  
Alwis L., 2011, OPT EXPRESS, V19, P4140
[5]   Relative humidity sensor based on SMS fiber structure with polyvinyl alcohol coating [J].
An, Jiali ;
Zhao, Yu ;
Jin, Yongxing ;
Shen, Changyu .
OPTIK, 2013, 124 (23) :6178-6181
[6]   Titanium dioxide nanoparticle based optical fiber humidity sensor with linear response and enhanced sensitivity [J].
Aneesh, R. ;
Khijwania, Sunil K. .
APPLIED OPTICS, 2012, 51 (12) :2164-2171
[7]  
[Anonymous], SENS TRANSDUCERS
[8]  
[Anonymous], ENCY SENS
[9]  
[Anonymous], CRITERIA MOISTURE CO
[10]   Optical fiber humidity sensor using a nano Fabry-Perot cavity formed by the ionic self-assembly method [J].
Arregui, FJ ;
Liu, YJ ;
Matias, IR ;
Claus, RO .
SENSORS AND ACTUATORS B-CHEMICAL, 1999, 59 (01) :54-59