Dual-mode micromirrors for optical phased array applications

We present design, analysis and characterization of dual-mode vertical comb-drive actuated micromirrors. These micromirror actuators can provide both piston motion and tilt, which allow us to precisely control the phase of an optical beam reflected from an array of micromirrors. We demonstrate the optical phased array functionality by spatially scanning an optical beam using a four-mirror array. The dual-mode micromirrors utilize vertical comb drive actuators that allow us to produce large deflections at relatively low voltages with continuous stable control over the full range of motion.