Ion beam sputtered surface dynamics investigated with two-time correlation functions: a model study

被引:12
作者
Bikondoa, Oier [1 ,2 ]
Carbone, Dina [3 ]
Chamard, Virginie [4 ]
Metzger, Till Hartmut [5 ]
机构
[1] ESRF, XMaS UK CRG Beamline, F-38043 Grenoble 09, France
[2] Univ Warwick, Dept Phys, Coventry CV4 7AL, W Midlands, England
[3] European Synchrotron Radiat Facil, F-38043 Grenoble 09, France
[4] Aix Marseille Univ, Inst Fresnel, CNRS, Ecole Cent Marseille, F-13097 Marseille 20, France
[5] Max Planck Inst Colloids & Interfaces, Dept Biomat, D-14424 Potsdam, Germany
基金
英国工程与自然科学研究理事会;
关键词
COHERENCE;
D O I
10.1088/0953-8984/24/44/445006
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Ion beam sputtering is a widely used technique to obtain patterned surfaces. Despite the wide use of this approach on different materials to create surface nanostructures, the theoretical model to explain the time evolution of the erosion process is still debated. We show, with the help of simulations, that two-time correlation functions can serve to assess the validity of different models. These functions can be measured experimentally with the x-ray photon correlation spectroscopy technique.
引用
收藏
页数:6
相关论文
共 42 条
[1]  
Barrat J.-L., 2003, SLOW RELAXATIONS NON
[2]  
Berne BJ, 2000, DYNAMIC LIGHT SCATTE
[3]   Synchrotron x-ray scattering from metal surfaces nanostructured by IBS [J].
Boragno, C. ;
Felici, R. .
JOURNAL OF PHYSICS-CONDENSED MATTER, 2009, 21 (22)
[4]   Theory of nanodot and sputter cone arrays produced by ion sputtering with concurrent deposition of impurities [J].
Bradley, R. Mark .
PHYSICAL REVIEW B, 2011, 83 (19)
[5]   Redeposition of sputtered material is a nonlinear effect [J].
Bradley, R. Mark .
PHYSICAL REVIEW B, 2011, 83 (07)
[6]   Ion-induced nanopatterns on semiconductor surfaces investigated by grazing incidence x-ray scattering techniques [J].
Carbone, D. ;
Biermanns, A. ;
Ziberi, B. ;
Frost, F. ;
Plantevin, O. ;
Pietsch, U. ;
Metzger, T. H. .
JOURNAL OF PHYSICS-CONDENSED MATTER, 2009, 21 (22)
[7]   Versatile vacuum chamber for in situ surface X-ray scattering studies [J].
Carbone, Dina ;
Plantevin, Olivier ;
Gago, Raul ;
Mocuta, Cristian ;
Bikondoa, Oier ;
Alija, Alejandro ;
Petit, Lucien ;
Djazuli, Hamid ;
Metzger, Till-Hartmut .
JOURNAL OF SYNCHROTRON RADIATION, 2008, 15 (414-419) :414-419
[8]   Roughening and ripple instabilities on ion-bombarded Si [J].
Carter, G ;
Vishnyakov, V .
PHYSICAL REVIEW B, 1996, 54 (24) :17647-17653
[9]   The physics and applications of ion beam erosion [J].
Carter, G .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2001, 34 (03) :R1-R22
[10]   Self-organized ordering of nanostructures produced by ion-beam sputtering -: art. no. 016102 [J].
Castro, M ;
Cuerno, R ;
Vázquez, L ;
Gago, R .
PHYSICAL REVIEW LETTERS, 2005, 94 (01)