Piezoelectric micromachined ultrasonic transducers with low thermoelastic dissipation and high quality factor

被引：28

作者：

Chen, Xuying ^{[1
]}

Liu, Xinxin ^{[1
]}

Wang, Tao ^{[2
]}

Le, Xianhao ^{[1
]}

Ma, Fangyi ^{[3
]}

Lee, Chengkuo ^{[4
]}

Xie, Jin ^{[1
]}

机构：

[1] Zhejiang Univ, State Key Lab Fluid Power & Mechatron Syst, Hangzhou 310027, Zhejiang, Peoples R China

[2] Univ Elect Sci & Technol China, Sch Microelect & Solid State Elect, Chengdu, Sichuan, Peoples R China

[3] Shaoxing Vocat & Technol Coll, Coll Mech & Elect Engn, Shaoxing 312000, Peoples R China

[4] Natl Univ Singapore, Dept Elect & Comp Engn, 4 Engn Dr 3, Singapore 11757, Singapore

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2018年 / 28卷 / 05期

基金：

中国国家自然科学基金;

关键词：

piezoelectric micromachined ultrasonic transducers; thermoelastic dissipation; quality factor; etching holes; INTERNAL-FRICTION;

D O I：

10.1088/1361-6439/aab1bc

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Thermoelastic dissipation is one of the main dissipative mechanisms in piezoelectric micromachined ultrasonic transducers (pMUTs). In this paper, we firstly propose pMUTs with etching holes to decrease thermoelastic dissipation and enhance quality factor (Q). The etching holes effectively disturb heat flow, and thus reduce thermoelastic loss. Working mechanism based on the Zener's model is interpreted. The experiment results show that the Q of pMUT with three rows of holes is increased by 139% from 2050 to 4909 compared with the traditional one. Temperature coefficient of frequency (TCF) and vibration performance are also improved. The enhanced pMUT can be widely used in measurement of Doppler shift and relative high power applications.

引用

页数：9

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