Thermal writing using a heated atomic force microscope tip

被引:84
作者
Mamin, HJ
机构
[1] IBM Research Division, Almaden Research Center, San Jose, CA 95120-6099
关键词
D O I
10.1063/1.118085
中图分类号
O59 [应用物理学];
学科分类号
摘要
Resistive heating of an atomic force microscope tip was used to perforin thermally induced surface modifications. Heating was achieved by dissipating power in the legs of an electrically conducting silicon cantilever. Temperatures of up to 170 degrees C were obtained using 40 mW of input power. Electrical measurements used to monitor the temperature showed thermal time constants of 0.35-0.45 ms, depending on whether the tip was in contact with a substrate. The heated tip was used to demonstrate thermomechanical writing on a polycarbonate substrate, as well as thermal writing of an optical phase change material. (C) 1996 American Institute of Physics.
引用
收藏
页码:433 / 435
页数:3
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