共 50 条
- [1] Measurement of Young's modulus and stress analysis of a magnetic thin film 1996, JSME, Tokyo, Japan (39):
- [2] Young's modulus measurement of thin film PZT Biennial University/Government/Industry Microelectronics Symposium - Proceedings, 1999, : 153 - 157
- [3] Young's modulus measurement of aluminum thin film with cantilever structure MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY VII, 2001, 4557 : 225 - 232
- [4] Measurement of thin film Young's modulus from multilayer membranes Dianzi Qijian/Journal of Electron Devices, 2001, 24 (01):
- [7] Young's modulus of polysilicon thin film evaluated by finite element analysis PROGRESSES IN FRACTURE AND STRENGTH OF MATERIALS AND STRUCTURES, 1-4, 2007, 353-358 : 2227 - +
- [9] Measurement of Young's modulus and residual stress of micromembranes MHS '96 - PROCEEDINGS OF THE SEVENTH INTERNATIONAL SYMPOSIUM ON MICRO MACHINE AND HUMAN SCIENCE: TOWARD MICRO-MECHATRONICS IN 21ST CENTURY, 1996, : 125 - 129