Towards sub-Å electron beams

被引：467

作者：

Krivanek, OL

Dellby, N

Lupini, AR

机构：

[1] Nion R&D, Kirkland, WA 98033 USA

[2] Univ Washington, Dept Mat Sci & Engn, Seattle, WA 98195 USA

[3] Univ Cambridge, Cavendish Lab, Cambridge CB3 0HE, England

来源：

ULTRAMICROSCOPY | 1999年 / 78卷 / 1-4期

关键词：

aberration correction; STEM; quadrupoles; octupoles;

D O I：

10.1016/S0304-3991(99)00013-3

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

The prospects for reaching sub-Angstrom electron probes through aberration correction in the scanning transmission electron microscope (STEM) are evaluated. The design, results and practical experience gained from a working 100 keV STEM C-s corrector ape presented and discussed. The design of a second-generation quadrupole-octupole C-s corrector that pays particular attention to the influence of instabilities is outlined. Probe shapes calculated for the new corrector indicate that it will be able to produce a probe smaller than 1 Angstrom at 100 keV. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：1 / 11

页数：11

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