Porous Silicon Based Violet-UV Detector

被引:4
|
作者
Ahmed, Naser M. [1 ]
Hassan, Z. [1 ]
Alhardan, Naif [3 ]
Aldouri, Yarub [2 ]
Jassim, M. J. [1 ]
Hajar, Muhammad Anis Ibnu [1 ]
Bakhdri, S. K. Mohd [1 ]
Zaini, N. A. Ahmad [1 ]
机构
[1] Univ Sains Malaysia, Sch Phys, George Town 11800, Malaysia
[2] Univ Malaysia, INEE, Perlis, Malaysia
[3] Univ Kebangsaan Malaysia, Inst Microengn & Nanoelect, Bangi, Malaysia
关键词
UV detector; Porous silicon; electrochemical anodic etching; VISIBLE LUMINESCENCE; BLUE EMISSION; PHOTOLUMINESCENCE; SI;
D O I
10.1063/1.4769144
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A new method of fabricating porous silicon detecting (Violet-UV) spectral regions is presented. This method uses a stencil mask contained matrix of round holes, typically 0.5 mm in diameter. SEM, and PL have been used to characterize the morphological and optical properties of the porous silicon (Psi). SEM shows uniformed circular pores with 85% porosity. The studies of the porous structure and optical properties showed that the band gap is about 3.6396 eV at 340.7 nm). Silver (Ag) fingers contact was deposited on the PSi to form MSM (full name) photo- detector. The detector shows in both wavelengths (400 nm, 365 nm) with repetitive shots have very high stability and reliability and the rise time is about 0.5 sec for a 3 volts reverse bias for UV light (365 nm) illumination and 10.41 sec for Violet light (400 nm).
引用
收藏
页码:196 / 210
页数:15
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