Design and Test of the MEMS Coupled Piezoelectric-Electromagnetic Energy Harvester

被引：36

作者：

Cao, Lian-min ^{[1
]}

Li, Zhi-xu ^{[1
]}

Guo, Cheng ^{[1
]}

Li, Peng-peng ^{[1
]}

Meng, Xiang-qiang ^{[1
]}

Wang, Ting-ming ^{[1
]}

机构：

[1] Shandong Univ Sci & Technol, Coll Mech & Elect Engn, Qingdao 266590, Shandong, Peoples R China

来源：

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING | 2019年 / 20卷 / 04期

关键词：

Coupled energy harvester; Piezoelectric; Electromagnetic; MEMS; Double-end clamped;

D O I：

10.1007/s12541-019-00051-x

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper researches on the design and test of the output performance of double-end clamped MEMS coupled piezoelectric-electromagnetic energy harvester. It establishes the theoretical output model of the double-end clamped rectangular beam and trapezoidal beam piezoelectric-electromagnetic energy harvester, and optimizes the structure parameters of piezoelectric and electromagnetic unit with simulation analysis. It also respectively realizes the processing of piezoelectric and electromagnetic unit by MEMS and flexible PCB technology, and completes the performance test of structure prototype through the experimental system. The result showed that the capacity of MEMS coupled piezoelectric-electromagnetic energy harvester, which taked four coil piezoelectric with integrated electromagnetic in series, was 12.23 times higher than that of piezoelectric energy harvester. Also the output voltage and power of coupled trapezoidal beam energy harvester were respectively increased 18.89% and 2.26%, compared with coupled rectangular beam energy harvester.

引用

页码：673 / 686

页数：14

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