Modal wavefront reconstruction based on Zernike polynomials for lateral shearing interferometry: comparisons of existing algorithms

被引：102

作者：

Dai, Fengzhao ^{[1
,2
]}

Tang, Feng ^{[1
]}

Wang, Xiangzhao ^{[1
,2
]}

Sasaki, Osami ^{[3
]}

Feng, Peng ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Lab Informat Opt & Optoelect Technol, Shanghai 201800, Peoples R China

[2] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China

[3] Niigata Univ, Fac Engn, Niigata 9502181, Japan

来源：

APPLIED OPTICS | 2012年 / 51卷 / 21期

基金：

中国国家自然科学基金;

关键词：

DIFFERENCE MEASUREMENTS; MATRIX FORMULATION; INTERFEROGRAMS; ABERRATIONS; OPTICS;

D O I：

10.1364/AO.51.005028

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Four modal methods of reconstructing a wavefront from its difference fronts based on Zernike polynomials in lateral shearing interferometry are currently available, namely the Rimmer-Wyant method, elliptical orthogonal transformation, numerical orthogonal transformation, and difference Zernike polynomial fitting. The present study compared these four methods by theoretical analysis and numerical experiments. The results show that the difference Zernike polynomial fitting method is superior to the three other methods due to its high accuracy, easy implementation, easy extension to any high order, and applicability to the reconstruction of a wavefront on an aperture of arbitrary shape. Thus, this method is recommended for use in lateral shearing interferometry for wavefront reconstruction. (C) 2012 Optical Society of America

引用

页码：5028 / 5037

页数：10

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