High-speed and high-sensitivity displacement measurement with phase-locked low-coherence interferometry

被引：3

作者：

Manojlovic, Lazo M. ^{[1
]}

Zivanov, Milos B. ^{[2
]}

Slankamenac, Milos P. ^{[2
]}

Bajic, Jovan S. ^{[2
]}

Stupar, Dragan Z. ^{[2
]}

机构：

[1] Zrenjanin Tech Coll, Zrenjanin 23000, Serbia

[2] Univ Novi Sad, Fac Tech Sci, Novi Sad 21000, Serbia

来源：

APPLIED OPTICS | 2012年 / 51卷 / 19期

关键词：

FIBER INTERFEROMETERS; DIRECTIONAL-COUPLERS; SCHEME;

D O I：

10.1364/AO.51.004333

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A novel high-speed and high-sensitivity displacement measurement sensing system, based on the phase-locked low-coherence interferometry, is presented. The sensing system is realized by comprising the Michelson fiber-optic interferometer. In order to obtain quadrature signals at the interferometer outputs, a 3 x 3 fused silica fiber-optic directional coupler is used. Therefore, the usage of the interferometer phase modulation as well as the usage of the lock-in amplification has been avoided. In this way, the speed of such a realized sensing system is significantly increased in comparison with the standard phase-locked interferometric systems that can be found elsewhere in the literature. The bandwidth of the realized sensing system is limited by the first resonance frequency of the used piezo actuator to 4.6 kHz. The estimated noise floor in the displacement measurement is approximately 180 pm/root Hz. (C) 2012 Optical Society of America

引用

页码：4333 / 4342

页数：10

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