Depth profiling of nitrogen within 15N-incorporated nano-crystalline diamond thin films

被引：2
作者：
Garratt, E. [1 ]
AlFaify, S. [1 ,2 ]
Cassidy, D. P. [3 ]
Dissanayake, A. [1 ]
Mancini, D. C. [4 ]
Ghantasala, M. K. [5 ]
Kayani, A. [1 ]
机构：
[1] Western Michigan Univ, Dept Phys, Kalamazoo, MI 49008 USA
[2] King Khalid Univ, Fac Sci, Dept Phys, Abha, Saudi Arabia
[3] Western Michigan Univ, Mallinson Inst Sci Educ, Kalamazoo, MI 49008 USA
[4] Argonne Natl Lab, Argonne, IL 60439 USA
[5] Western Michigan Univ, Dept Mech & Aerosp Engn, Kalamazoo, MI 49008 USA
来源：
APPLIED PHYSICS LETTERS | 2013年 / 103卷 / 13期
基金：
美国国家科学基金会;
关键词：
NANOCRYSTALLINE DIAMOND; ELECTRONIC-STRUCTURE; RAMAN-SPECTRA; ULTRANANOCRYSTALLINE; NUCLEATION; SPECTROSCOPY; GROWTH;
D O I：
10.1063/1.4822266
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Nano-Crystalline Diamond (NCD) thin films are a topic of recent interest due to their excellent mechanical and electrical properties. The inclusion of nitrogen is a specific interest as its presence within NCD modifies its conductive properties. The methodology adopted for the characterization of nitrogen incorporated NCD films grown on a chromium underlayer determined a correlation between the chromium and nitrogen concentrations as well as a variation in the concentration profile of elements. Additionally, the concentration of nitrogen was found to be more than three times greater for these films versus those grown on a silicon substrate. (C) 2013 AIP Publishing LLC.
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页数：5
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共 37 条
  • [1] Optical properties of nanocrystalline diamond thin films
    Achatz, P
    Garrido, JA
    Stutzmann, M
    Williams, OA
    Gruen, DM
    Kromka, A
    Steinmüller, D
    [J]. APPLIED PHYSICS LETTERS, 2006, 88 (10)
  • [2] Ion Beam Analysis Of Nitrogen Incorporated Ultrananocrystalline Diamond (UNCD) Thin Films
    AlFaify, S.
    Garratt, E.
    Dissanayake, A.
    Mancini, D. C.
    Kayani, A.
    [J]. APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY: TWENTY-FIRST INTERNATIONAL CONFERENCE, 2011, 1336 : 260 - 263
  • [3] [Anonymous], P 20 ASM HEAT TREAT
  • [4] Transport properties of n-type ultrananocrystalline diamond films
    Beloborodov, I. S.
    Zapol, P.
    Gruen, D. M.
    Curtiss, L. A.
    [J]. PHYSICAL REVIEW B, 2006, 74 (23):
  • [5] Interpretation of the Raman spectra of ultrananocrystalline diamond
    Birrell, J
    Gerbi, JE
    Auciello, O
    Gibson, JM
    Johnson, J
    Carlisle, JA
    [J]. DIAMOND AND RELATED MATERIALS, 2005, 14 (01) : 86 - 92
  • [6] Bonding structure in nitrogen doped ultrananocrystalline diamond
    Birrell, J
    Gerbi, JE
    Auciello, O
    Gibson, JM
    Gruen, DM
    Carlisle, JA
    [J]. JOURNAL OF APPLIED PHYSICS, 2003, 93 (09) : 5606 - 5612
  • [7] Morphology and electronic structure in nitrogen-doped ultrananocrystalline diamond
    Birrell, J
    Carlisle, JA
    Auciello, O
    Gruen, DM
    Gibson, JM
    [J]. APPLIED PHYSICS LETTERS, 2002, 81 (12) : 2235 - 2237
  • [8] The CVD of nanodiamond materials
    Butler, James E.
    Sumant, Anirudha V.
    [J]. CHEMICAL VAPOR DEPOSITION, 2008, 14 (7-8) : 145 - 160
  • [9] On the mechanism of enhancing the nucleation behavior of UNCD films by Mo-coating
    Chen, Huang-Chin
    Liu, Keng-Fu
    Tai, Nyan-Hua
    Pong, Way-Faung
    Lin, I-Nan
    [J]. DIAMOND AND RELATED MATERIALS, 2010, 19 (2-3) : 134 - 137
  • [10] Ultrananocrystalline Diamond-Based High-Velocity SAW Device Fabricated by Electron Beam Lithography
    Dow, Ali B. Alamin
    Lin, H.
    Schneider, M.
    Petkov, Ch
    Bittner, A.
    Ahmed, A.
    Popov, C.
    Schmid, U.
    Kherani, Nazir P.
    [J]. IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2012, 11 (05) : 979 - 984
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