Fabrication of porous and pillar-shaped Mg by magnetron sputtering

被引：4

作者：

Ham, B. ^{[1
]}

Junkew, A. ^{[2
]}

Bufford, D. ^{[2
]}

Arroyave, R. ^{[1
,2
]}

Zhang, X. ^{[1
,2
]}

机构：

[1] Texas A&M Univ, Dept Mech Engn, College Stn, TX 77843 USA

[2] Texas A&M Univ, Dept Mat Sci & Engn, College Stn, TX 77843 USA

来源：

THIN SOLID FILMS | 2014年 / 550卷

基金：

美国国家科学基金会;

关键词：

Porous Mg; Mg pillars; Platelets; Sputtering; GLANCING ANGLE DEPOSITION; THIN-FILMS; SELF-DIFFUSION; VAPOR-DEPOSITION; GOLD; RF; STRESS; GROWTH; DC; AL;

D O I：

10.1016/j.tsf.2013.10.173

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report on the synthesis of nanostructured Mg platelets with nanopores and Mg pillars by magnetron sputtering techniques under different deposition conditions. By varying deposition parameters, the morphology of Mg varied from fully dense epitaxial films to polycrystalline nanoporous structures containing hexagonal platelets. The influence of layer thickness, deposition rate, incidence angle and mode of deposition (DC vs. RF sputtering) on morphology of Mg was investigated. Mg nanopillars were formed via glancing angle deposition technique. Density functional theory (DFT) calculation was performed to examine the influence of surface diffusion on morphology of Mg films. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：220 / 226

页数：7

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