Effect of antenna size on electron kinetics in inductively coupled plasmas

被引：26

作者：

Lee, Hyo-Chang ^{[1
]}

Chung, Chin-Wook ^{[1
]}

机构：

[1] Hanyang Univ, Dept Elect Engn, Seoul 133791, South Korea

来源：

PHYSICS OF PLASMAS | 2013年 / 20卷 / 10期

基金：

新加坡国家研究基金会;

关键词：

ENERGY DISTRIBUTION FUNCTION; POWER DEPOSITION; DISCHARGE; TRANSITION; DENSITY; DISTRIBUTIONS; TEMPERATURE; PROPERTY; EQUATION; COLUMN;

D O I：

10.1063/1.4823470

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Spatially resolved measurements of electron energy distribution functions (EEDFs) are investigated in inductively coupled plasmas with two planar antenna coils. When the plasma is sustained by the antenna with a diameter of 18 cm, the nonlocal kinetics is preserved in the argon gas pressure range from 2 mTorr to 20 mTorr. However, electron kinetics transit from nonlocal kinetics to local kinetics in discharge sustained by the antenna coil with diameter 34 cm. The results suggest that antenna size as well as chamber length are important parameters for the transition of the electron kinetics. Spatial variations of plasma potential, effective electron temperature, and EEDF in terms of total electron energy scale are also presented. (C) 2013 AIP Publishing LLC.

引用

页数：6

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