Interferometric technique for controlling wedge angle and surface flatness of optical slabs

被引：19

作者：

Andrushchak, A. S. ^{[1
,2
]}

Voronyak, T. I. ^{[2
,3
]}

Yurkevych, O. V. ^{[2
]}

Andrushchak, N. A. ^{[2
]}

Kityk, A. V. ^{[1
]}

机构：

[1] Czestochowa Tech Univ, Inst Comp Sci, Dept Elect Engn, PL-42200 Czestochowa, Poland

[2] Lviv Polytech Natl Univ, UA-79013 Lvov, Ukraine

[3] NASU, Karpenko Physico Mech Inst, UA-79060 Lvov, Ukraine

来源：

OPTICS AND LASERS IN ENGINEERING | 2013年 / 51卷 / 04期

关键词：

Interferometric technique; Optical quality control; Sample wedging measurements; LINBO3; CRYSTALS; INDICATIVE SURFACES; SPATIAL ANISOTROPY; COEFFICIENTS;

D O I：

10.1016/j.optlaseng.2012.12.006

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report on a laboratory setup suitable for quality control and analysis of optical slabs in the sense of perfection of their geometry and optical bulk homogeneity. Our non-contact technique based on principles of interferometry permits high-speed, precise quantitative characterization of the wedge (apex) angle and/or face flatness imperfection, as well as bulk inhomogeneity of optical slabs. The setup has been subjected to test measurements on several samples manufactured from pure and MgO-doped LiNbO3 crystals for which the wedge angle and flatness deviation have been evaluated. The technique and the methodology developed by us can be offered for use in scientific research laboratories and industry. (C) 2012 Elsevier Ltd. All rights reserved.

引用

页码：342 / 347

页数：6

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