Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications

被引：4

作者：

Afsharipour, Elnaz ^{[1
]}

Soltanzadeh, Ramin ^{[1
]}

Park, Byoungyoul ^{[1
]}

Chrusch, Dwayne ^{[1
]}

Shafai, Cyrus ^{[1
]}

机构：

[1] Univ Manitoba, Fac Engn, Dept Elect & Comp Engn, Winnipeg, MB, Canada

来源：

JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS | 2019年 / 18卷 / 01期

基金：

加拿大自然科学与工程研究理事会;

关键词：

microelectromechanical system mirror; scanning micromirror; Lorentz actuator; electromagnetic actuator; three degree of freedom; FOURIER-TRANSFORM SPECTROMETER; MICROSCANNER; MICROMIRROR; DRIVEN;

D O I：

10.1117/1.JMM.18.1.015001

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A low-power three-degree-of-freedom scanning micromirror is presented. The 2- x 2-mm mirror is a gimbaless structure, directly supported by single-crystal microsprings. It is actuated by Lorentz force and is able to tilt about two axes and has linear motion in a third-axis. The transient and frequency responses of the micromirror are analyzed. The Lagrange's equations of motions describing the dynamic behavior of the system are presented and show a good agreement with the experimental results. The fabricated microelectromechanical system mirror demonstrates a tilt angle of 22.8 deg at 247.5 Hz about y-axis, and 13.3 deg at 292.7 Hz about x-axis, in a 0.1 T magnetic field and 20-mA current on the mirror. Power consumption is 2.6 mW of power in tilting motions in resonant operation. With a total DC-drive current of 110 mA, 232-mu m linear motion is achieved. (C) 2019 Society of Photo-Optical Instrumentation Engineers (SPIE)

引用

页数：11

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