Influence of Deposition Time on Properties of the RF Sputtered TiO2 Thin Films

被引：2

作者：

Chaabouni, F. ^{[1
]}

Costa, L. C. ^{[2
]}

Selmi, M. ^{[1
]}

Abaab, M. ^{[1
]}

Rezig, B. ^{[1
]}

机构：

[1] Photovolta & Semicond Mat Lab, ENIT POB 37,Belvedere 1002, Tunis, Tunisia

[2] Univ Aveiro, Dept Phys, P-3810193 Aveiro, Portugal

来源：

ADVANCED MATERIALS FORUM IV | 2008年 / 587-588卷

关键词：

TiO2; RF sputtering; deposition time; annealing;

D O I：

10.4028/www.scientific.net/MSF.587-588.824

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

TiO2 films were prepared using radio frequency (RF) magnetron sputtering and were deposited on glass and Si substrates. We varied deposition time at room temperature with RV density of 3.7 W/cm(2) and argon flow rate of 4 seem. The morphological, structural, optical and electrical properties were studied by Atomic Force Microscope (AFM), X ray Diffractometer (XRD) and UV-VIS-NIR spcetrophotometer. The transmittance is maintained in the range of 70-90% in the visible and near-infrared range, high refractive index of 2.4 and large direct hand gap of about 3.5 eV arc obtained. These films arc annealed at 300 C during 2 hours. The annealing effect is investigated in this work. file results of this study suggest that the variation of the deposition time allow the control of the structural. optical and electrical properties of the films.

引用

页码：824 / +

页数：2

共 19 条

[1] Study of TiO2 film growth mechanisms in low-pressure plasma by in situ real-time spectroscopic ellipsometry [J].

Amassian, A ;

Desjardins, P ;

Martinu, L .

THIN SOLID FILMS, 2004, 447 :40-45

[2]

Bunshah F.R., 1994, HDB DEPOSITION TECHN, V2

[3] Optical and dielectric properties of highly oriented (Zr0.8,Sn0.2)TiO4 thin films prepared by rf magnetron sputtering [J].

Cheng, WX ;

Ding, AL ;

Qiu, PS ;

He, XY ;

Zheng, XSH .

APPLIED SURFACE SCIENCE, 2003, 214 (1-4) :136-142

[4] Optical and crystallisation behaviour of TiO2 and V/TiO2 thin films prepared by plasma and ion beam assisted methods [J].

Gracia, F ;

Holgado, JP ;

Contreras, L ;

Girardeau, T ;

González-Elipe, AR .

THIN SOLID FILMS, 2003, 429 (1-2) :84-90

[5] BETA-ADRENERGIC REGULATION OF THE EOSINOPHIL RESPIRATORY BURST AS DETECTED BY LUCIGENIN-DEPENDENT LUMINESCENCE [J].

HADJOKAS, NE ;

CROWLEY, JJ ;

BAYER, CR ;

NIELSON, CP .

JOURNAL OF ALLERGY AND CLINICAL IMMUNOLOGY, 1995, 95 (03) :735-741

[6] Deposition of TiO2 Films by reactive Inductively Coupled Plasma assisted DC magnetron sputtering for high crystallinity and high deposition rate [J].

Han, Y. H. ;

Jung, S. J. ;

Lee, J. J. .

SURFACE & COATINGS TECHNOLOGY, 2007, 201 (9-11) :5387-5391

[7] Influence of annealing temperature on the properties of titanium oxide thin film [J].

Hou, YQ ;

Zhuang, DM ;

Zhang, G ;

Zhao, M ;

Wu, MS .

APPLIED SURFACE SCIENCE, 2003, 218 (1-4) :97-105

[8] STRUCTURE AND COMPOSITION REQUIREMENTS FOR DEOXYGENATION, DEHYDRATION, AND KETONIZATION REACTIONS OF CARBOXYLIC-ACIDS ON TIO2(001) SINGLE-CRYSTAL SURFACES [J].

KIM, KS ;

BARTEAU, MA .

JOURNAL OF CATALYSIS, 1990, 125 (02) :353-375

[9] PHOTOCATALYSIS ON TIO2 SURFACES - PRINCIPLES, MECHANISMS, AND SELECTED RESULTS [J].

LINSEBIGLER, AL ;

LU, GQ ;

YATES, JT .

CHEMICAL REVIEWS, 1995, 95 (03) :735-758

[10] MORPHOLOGY AND STRUCTURE OF TIO2 THIN-LAYERS VS THICKNESS AND SUBSTRATE-TEMPERATURE [J].

LOTTIAUX, M ;

BOULESTEIX, C ;

NIHOUL, G ;

VARNIER, F ;

FLORY, F ;

GALINDO, R ;

PELLETIER, E .

THIN SOLID FILMS, 1989, 170 (01) :107-126

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