Reaction dynamics of CWAr+ laser induced copper direct writing from liquid electrolyte on polyimide substrates

被引:30
作者
Kordás, K
Nánai, L
Galbács, G
Uusimäki, A
Leppävuori, S
Bali, K
机构
[1] Attila Jozsef Univ, Dept Expt Phys, H-6720 Szeged, Hungary
[2] Gyula Juhasz Coll Ped, Dept Phys, H-6720 Szeged, Hungary
[3] Attila Jozsef Univ, Dept Inorgan & Analyt Chem, H-6720 Szeged, Hungary
[4] Univ Oulu, Microelect Lab, FIN-90570 Oulu, Finland
[5] Univ Oulu, Mat Phys Lab, FIN-90570 Oulu, Finland
[6] Univ Oulu, EMPART Res Grp Infotech Oulu, FIN-90570 Oulu, Finland
基金
匈牙利科学研究基金会;
关键词
metallization; integrated circuits; reaction kinetics; chemical; laser radiation; surface irradiation effects; polymers; radiation effects; deposition; films and coatings;
D O I
10.1016/S0169-4332(99)00602-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Conductive copper patterns were deposited on polyimide (PI) surfaces using a focused, scanned CW Ar+ laser beam at 488-nm wavelength. The deposition process was initiated by a photothermal reaction of a tartarate-complex solution of Cu2+ ions in an alkaline and reducing medium. Deposits were characterised by Field Emission Scanning Electron Microscope (FESEM), Energy Dispersive X-ray Spectrometry (EDS) and resistance measurements. The mass of the deposited copper (m(Cu)) and also the rate of the deposition (dm(Cu)/dt) were calculated from the resistance measurements, The dependence of the copper deposition rate on the scanning speed of the laser beam, number of scans, laser power and the temperature of the solution were examined, It was found that more chemical reactions were running parallel during the direct writing process yielding metallic copper and copper(II)-oxide on the PI surface. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:127 / 133
页数:7
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