Optical investigation of stacking faults in 4H-SiC epitaxial layers: Comparison of 3C and 8H polytypes

被引:7
作者
Juillaguet, S. [1 ,2 ]
Robert, T. [1 ,2 ]
Camassel, J. [1 ,2 ]
机构
[1] Univ Montpellier 2, Etud Semicond Grp, F-34095 Montpellier 5, France
[2] CNRS, Etud Semicond Grp, F-34095 Montpellier 5, France
来源
MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS | 2009年 / 165卷 / 1-2期
关键词
Silicon carbide; Stacking faults; Photoluminescence; Quantum well; Electrical field; SPONTANEOUS POLARIZATION; TRANSFORMATION;
D O I
10.1016/j.mseb.2008.11.004
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We present an analysis of the electronic structure of in-grown 3C and 8H stacking faults (SFs) in a 4H-SiC matrix. First, the concept of low-temperature photoluminescence optical signature of SFs is discussed. Then, the results of type-II quantum well (QW) model calculations are displayed, taking into account the effect of the valence band offset, internal polarization field and non-homogeneity of the potential well. In this case, we show that a satisfactory description of 3C QWs signature can be reached. The situation is entirely different for 8H. Since a 8H-unit cell is nothing but two 3C lamellae coupled by ail hexagonal turn, we investigate in detail the effect of coupling more and more two 3C lamellae until a final 8H QW is found. In this way, we show that a reasonable agreement with experimental data can be reached. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:5 / 8
页数:4
相关论文
共 25 条
[1]   Spontaneous polarization of 4H SiC determined from optical emissions of 4H/3C/4H-SiC quantum wells [J].
Bai, S ;
Devaty, RP ;
Choyke, WJ ;
Kaiser, U ;
Wagner, G ;
MacMillan, MF .
SILICON CARBIDE AND RELATED MATERIALS 2003, PTS 1 AND 2, 2004, 457-460 :573-576
[2]   Determination of the electric field in 4H/3C/4H-SiC quantum wells due to spontaneous polarization in the 4H SiC matrix [J].
Bai, S ;
Devaty, RP ;
Choyke, WJ ;
Kaiser, U ;
Wagner, G ;
MacMillan, MF .
APPLIED PHYSICS LETTERS, 2003, 83 (15) :3171-3173
[3]   Spectra associated with stacking faults in 4H-SiC grown in a hot-wall CVD reactor [J].
Bai, S ;
Wagner, G ;
Shishkin, E ;
Choyke, WJ ;
Devaty, RP ;
Zhang, M ;
Pirouz, P ;
Kimoto, T .
SILICON CARBIDE AND RELATED MATERIALS 2001, PTS 1 AND 2, PROCEEDINGS, 2002, 389-3 :589-592
[4]  
BERGMAN JP, 2001, MATER SCI FORUM, V299, P353
[5]   Optical properties of as-grown and process-induced stacking faults in 4H-SiC [J].
Camassel, J. ;
Juillaguet, S. .
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2008, 245 (07) :1337-1355
[6]   Optical investigation methods for SiC device development: application to stacking faults diagnostic in active epitaxial layers [J].
Camassel, J. ;
Juillaguet, S. .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (20) :6264-6277
[7]   Intensity ratio of the doublet signature of excitons bound to 3C-SiC stacking faults in a 4H-SiC matrix [J].
Camassel, J ;
Juillaguet, S .
SILICON CARBIDE AND RELATED MATERIALS 2004, 2005, 483 :331-334
[8]  
CHOYKE WJ, 2004, SILICON CARBIDE RECE, P737
[9]   Stacking fault formation in highly doped 4H-SiC epilayers during annealing [J].
Chung, HJ ;
Liu, JQ ;
Skowronski, M .
APPLIED PHYSICS LETTERS, 2002, 81 (20) :3759-3761
[10]   MBE growth and properties of SiC multi-quantum well structures [J].
Fissel, A ;
Kaiser, U ;
Schröter, B ;
Richter, W ;
Bechstedt, F .
APPLIED SURFACE SCIENCE, 2001, 184 (1-4) :37-42