Model interface between silicon and disordered SiO2

被引:0
作者
Pasquarello, A [1 ]
Hybertsen, MS [1 ]
机构
[1] Ecole Polytech Fed Lausanne, PPH Ecublens, IRRMA, CH-1015 Lausanne, Switzerland
来源
PHYSICS AND CHEMISTRY OF SIO2 AND THE SI-SIO2 INTERFACE - 4 | 2000年 / 2000卷 / 02期
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D O I
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中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
A model interface between Si and disordered SiO(2) is obtained which incorporates the interface bonding pattern previously generated by first-principles molecular dynamics. The model is then characterized by comparing its properties with experimental data which provide an atomic-scale characterization of the interfacial region. The model is found to adequately reproduce the disordered nature of the oxide, the good coordination at the interface, the transition to stoichiometric SiO(2), and the photoemission data. In particular, calculated Si 2p core-level shifts show a linear dependence on the number of nearest neighbor O atoms, confirming previous results obtained for interface models with ordered oxides. The comparisons with X-ray reflectivity and ion scattering experiments, which set constraints on the density in the oxide and on the size of the displacements in the upper part of the substrate, respectively, are also discussed.
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页码:271 / 282
页数:6
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