Nanometer-scale depth resolution and sensitive surface analysis using laser ablation atomic fluorescence spectroscopy

被引：4
作者：
Nakamura, D
Oki, Y
Higotani, T
Takao, T
Maeda, M
机构：
[1] Kyushu Univ, Dept Elect Device Engn, Grad Sch Informat Sci & Elect Engn, Higashi Ku, Fukuoka 8128581, Japan
[2] Kurume Natl Coll Technol, Kurume, Fukuoka 8308555, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2006年 / 45卷 / 6A期
关键词：
surface analysis; laser spectroscopy; nanometer; trace element; laser ablation;
D O I：
10.1143/JJAP.45.5322
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
An extremely high-resolution, nanometer-resolution, solid-surface trace element detection has been demonstrated. Nanometer-thinned pulsed laser ablation was combined with extremely sensitive laser-induced fluorescence spectroscopy, and depth resolution of 3.6 nm was experimentally demonstrated for the first time on sodium detection in polymeric samples. An extremely high absolute detection limit of 25.2 fg was also obtained, and a theoretical calculation program was also generated to analyze the results.
引用
收藏
页码：5322 / 5325
页数：4
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