FEM simulation of BAW/SAW and SAW/BAW conversions in gratings on the surface of half-infinite substrates

被引：0
|
作者：
Darinskii, Alexander [1 ]
Weihnacht, Manfred [1 ]
Schmidt, Hagen [1 ]
机构：
[1] RAS, Inst Crystallog, Moscow 119333, Russia
来源：
2012 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2012年
关键词：
WAVES;
D O I：
10.1109/ULTSYM.2012.0202
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
FEM simulations of the SAW-BAW conversion in gratings of finite length are carried out for Si substrate. The grating is created from rectangular grooves or strips (Al, Cu). When simulating the SAW generation, we determine the SAW amplitude and investigate its dependence on the frequency and the polarization of the incident BAW, the length of the grating, the geometrical sizes of grooves/strips. As applied to BAW irradiation, the dependence is found of the central spectral peak height and shape on the frequency of the incident SAW as well as on the thickness, the width, and the number of grooves/strips.
引用
收藏
页码：811 / 814
页数：4
相关论文
共 10 条
  • [1] Novel FEM Models of Intermodulation Effects in BAW and SAW Devices
    Pang, Xiangnan
    Yong, Yook-Kong
    2019 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2019, : 177 - 180
  • [2] Temperature and strain SAW/BAW sensors on metallic substrates with RFID capability
    Mengue, Prince
    Paulmier, Baptiste
    Hage-Ali, Sami
    Noirel, Cyril
    Poncot, Marc
    Floer, Cecile
    M'Jahed, Hamid
    Shvetsov, Alexander
    Zhgoon, Sergei
    Nicolay, Pascal
    Elmazria, Omar
    SMART MATERIALS AND STRUCTURES, 2023, 32 (09)
  • [3] Traveling Wave Excitation for WM Simulation of RF SAW/BAW Devices
    Li, Xinyi
    Bao, Jingfu
    Huang, Yulin
    Zhang, Benfeng
    Omori, Tatsuya
    Hashimoto, Ken-ya
    2017 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2017,
  • [4] Analysis of a SAW-BAW mutual transducer of finite length on piezoelectric substrates
    Dulmet, B
    PROCEEDINGS OF THE 2001 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & PDA EXHIBITION, 2001, : 514 - 519
  • [5] Parallel processing simulation of the propagation of BAW-SAW transducer generated waves
    Delsanto, PP
    Ruffino, E
    Anisimkin, AI
    Luprano, VAM
    Montagna, G
    Schechter, RS
    Mignogna, RB
    TRENDS IN NDE SCIENCE AND TECHNOLOGY - PROCEEDINGS OF THE 14TH WORLD CONFERENCE ON NDT (14TH WCNDT), VOLS 1-5, 1996, : 2153 - 2156
  • [6] Simulation of Nonlinear Resonance, Amplitude-Frequency, and Harmonic Generation Effects in SAW and BAW Devices
    Pang, Xiangnan
    Yong, Yook-Kong
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2020, 67 (02) : 422 - 430
  • [7] FEM simulation of AlN thin layers on diamond substrates for high frequency SAW devices
    Maouhoub, S.
    Aoura, Y.
    Mir, A.
    DIAMOND AND RELATED MATERIALS, 2016, 62 : 7 - 13
  • [8] The BAW and SAW coupling analysis of patterned piezoelectric films as inter-digital transducers on diamond substrates using delta-function model
    Xie, B. W.
    Ding, F. Z.
    Shang, H. J.
    Huang, D. X.
    Li, T. G.
    Zou, Q.
    Gu, H. W.
    AIP ADVANCES, 2021, 11 (08)
  • [9] Mutual conversion of bulk and surface acoustic waves in gratings of finite length on half-infinite substrates. I. FE analysis of surface wave generation
    Darinskii, A. N.
    Weihnacht, M.
    Schmidt, H.
    ULTRASONICS, 2013, 53 (05) : 998 - 1003
  • [10] Mutual conversion of bulk and surface acoustic waves in gratings of finite length on half-infinite substrates. II. FE analysis of bulk wave generation
    Darinskii, A. N.
    Weihnacht, M.
    Schmidt, H.
    ULTRASONICS, 2013, 53 (05) : 1004 - 1011
1