Structure and gas-barrier properties of amorphous hydrogenated carbon films deposited on inner walls of cylindrical polyethylene terephthalate by plasma-enhanced chemical vapor deposition

被引：10

作者：

Li, Jing ^{[1
]}

Gong, Chunzhi ^{[1
,2
]}

Tian, Xiubo ^{[1
]}

Yang, Shiqin ^{[1
]}

Fu, Ricky K. Y. ^{[2
]}

Chu, Paul K. ^{[2
]}

机构：

[1] Harbin Inst Technol, Sch Mat Sci & Engn, State Key Lab Adv Welding Prod Technol, Harbin 150001, Peoples R China

[2] City Univ Hong Kong, Dept Phys & Mat Sci, Kowloon, Hong Kong, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2009年 / 255卷 / 07期

关键词：

Amorphous hydrogenated carbon film; Plasma-enhanced chemical vapor deposition; Radio frequency; Raman spectroscopy; Uniformity; DIAMOND-LIKE CARBON; A-C-H; SOURCE ION-IMPLANTATION; THIN-FILMS; OXYGEN-BARRIER; PET FILM; TRIBOLOGICAL PROPERTIES; IMPROVEMENT; DURABILITY; SURFACES;

D O I：

10.1016/j.apsusc.2008.10.064

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The influence of radio-frequency (RF) power on the structure and gas permeation through amorphous hydrogenated carbon films deposited on cylindrical polyethylene terephthalate (PET) samples is investigated. The results show that a higher radio-frequency power leads to a smaller sp(3)/sp(2) value but produces fewer defects with smaller size. The permeability of PET samples decreases significantly after a.C:H deposition and the RF only exerts a small influence. However, the coating uniformity, color, and wettability of the surface are affected by the RF power. A higher RF power results in to better uniformity and it may be attributed to the combination of the high-density plasma and sample heating. (C) 2008 Elsevier B. V. All rights reserved.

引用

页码：3983 / 3988

页数：6

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