Structure and gas-barrier properties of amorphous hydrogenated carbon films deposited on inner walls of cylindrical polyethylene terephthalate by plasma-enhanced chemical vapor deposition

被引：10

作者：

Li, Jing ^{[1
]}

Gong, Chunzhi ^{[1
,2
]}

Tian, Xiubo ^{[1
]}

Yang, Shiqin ^{[1
]}

Fu, Ricky K. Y. ^{[2
]}

Chu, Paul K. ^{[2
]}

机构：

[1] Harbin Inst Technol, Sch Mat Sci & Engn, State Key Lab Adv Welding Prod Technol, Harbin 150001, Peoples R China

[2] City Univ Hong Kong, Dept Phys & Mat Sci, Kowloon, Hong Kong, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2009年 / 255卷 / 07期

关键词：

Amorphous hydrogenated carbon film; Plasma-enhanced chemical vapor deposition; Radio frequency; Raman spectroscopy; Uniformity; DIAMOND-LIKE CARBON; A-C-H; SOURCE ION-IMPLANTATION; THIN-FILMS; OXYGEN-BARRIER; PET FILM; TRIBOLOGICAL PROPERTIES; IMPROVEMENT; DURABILITY; SURFACES;

D O I：

10.1016/j.apsusc.2008.10.064

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The influence of radio-frequency (RF) power on the structure and gas permeation through amorphous hydrogenated carbon films deposited on cylindrical polyethylene terephthalate (PET) samples is investigated. The results show that a higher radio-frequency power leads to a smaller sp(3)/sp(2) value but produces fewer defects with smaller size. The permeability of PET samples decreases significantly after a.C:H deposition and the RF only exerts a small influence. However, the coating uniformity, color, and wettability of the surface are affected by the RF power. A higher RF power results in to better uniformity and it may be attributed to the combination of the high-density plasma and sample heating. (C) 2008 Elsevier B. V. All rights reserved.

引用

页码：3983 / 3988

页数：6

共 36 条

[1] A study of ta-C, a-C:H and Si-a:C:H thin films on polymer substrates as a gas barrier [J].

Abbas, GA ;

McLaughlin, JA ;

Harkin-Jones, E .

[2] RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS [J].

BUBENZER, A ;

DISCHLER, B ;

BRANDT, G ;

KOIDL, P .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) :4590-4595

[3] Characterization of amorphous carbon thin films [J].

Capano, MA ;

McDevitt, NT ;

Singh, RK ;

Qian, F .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1996, 14 (02) :431-435

[4] Deposition of hard amorphous hydrogenated carbon films by radiofrequency parallel-plate hollow-cathode plasmas [J].

Capote, G. ;

Jacobsohn, L. G. ;

Michel, M. D. ;

Lepienski, C. M. ;

Vieira, A. L. ;

Franceschini, D. F. .

[5] On the deposition mechanism of a-C:H films by plasma enhanced chemical vapor deposition [J].

Cheng, YH ;

Wu, YP ;

Chen, JG ;

Qiao, XL ;

Xie, CS ;

Tay, BK ;

Lau, SP ;

Shi, X .

SURFACE & COATINGS TECHNOLOGY, 2000, 135 (01) :27-33

[6] The effect of RF power on tribological properties of the diamond-like carbon films [J].

Choi, WS ;

Heo, J ;

Chung, I ;

Hong, B .

THIN SOLID FILMS, 2005, 475 (1-2) :287-290

[7] Characterization of amorphous and nanocrystalline carbon films [J].

Chu, PK ;

Li, LH .

MATERIALS CHEMISTRY AND PHYSICS, 2006, 96 (2-3) :253-277

[8] Plasma deposition of carbon layer: Correlations between plasma parameters, film structure and properties [J].

Clergereaux, R. ;

Escaich, D. ;

de Larclause, I. Savin ;

Bernecker, B. ;

Raynaud, P. .

[9] STRUCTURE AND PHYSICAL-PROPERTIES OF PLASMA-GROWN AMORPHOUS HYDROGENATED CARBON-FILMS [J].

COUDERC, P ;

CATHERINE, Y .

THIN SOLID FILMS, 1987, 146 (01) :93-107

[10]

Dearnaley G., 1993, Clinical Materials, V12, P237, DOI 10.1016/0267-6605(93)90078-L

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