The effect of heat treatment on the physical properties of sol-gel derived ZnO thin films

被引:271
|
作者
Raoufi, Davood [1 ,2 ]
Raoufi, Taha [3 ]
机构
[1] Univ Bu Ali Sina, Dept Phys, Hamadan, Iran
[2] Univ Isfahan, Dept Phys, Quantum Opt Res Grp, Esfahan, Iran
[3] Islamic Azad Univ, Karaj Branch, Dept Phys, Karaj, Iran
关键词
ZnO; Sol-gel; Thin film; Structural and optical properties; ZINC-OXIDE FILMS; OPTICAL-PROPERTIES; TEMPERATURE; MICROSTRUCTURE; OPTIMIZATION; DEGRADATION; FABRICATION; GROWTH;
D O I
10.1016/j.apsusc.2009.01.010
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Zinc oxide (ZnO) thin films were deposited on microscope glass substrates by sol-gel spin coating method. Zinc acetate (ZnAc) dehydrate was used as the starting salt material source. A homogeneous and stable solution was prepared by dissolving ZnAc in the solution of monoethanolamine ( MEA). ZnO thin films were obtained after preheating the spin coated thin films at 250 degrees C for 5 min after each coating. The films, after the deposition of the eighth layer, were annealed in air at temperatures of 300 degrees C, 400 degrees C and 500 degrees C for 1 h. The effect of thermal annealing in air on the physical properties of the sol-gel derived ZnO thin films are studied. The powder and its thin film were characterized by X-ray diffractometer (XRD) method. XRD analysis revealed that the annealed ZnO thin films consist of single phase ZnO with wurtzite structure (JCPDS 36-1451) and show the c-axis grain orientation. Increasing annealing temperature increased the c-axis orientation and the crystallite size of the film. The annealed films are highly transparent with average transmission exceeding 80% in the visible range (400-700 nm). The measured optical band gap values of the ZnO thin films were between 3.26 eV and 3.28 eV, which were in the range of band gap values of intrinsic ZnO (3.2-3.3 eV). SEM analysis of annealed thin films has shown a completely different surface morphology behavior. (C) 2009 Elsevier B. V. All rights reserved.
引用
收藏
页码:5812 / 5817
页数:6
相关论文
共 50 条
  • [1] Effect of heat treatment on microstructure and transparent conducting properties of sol-gel ZnO/Al thin films
    Chen, J. L.
    Chen, D.
    Chen, Z. H.
    MATERIALS SCIENCE AND TECHNOLOGY, 2010, 26 (01) : 47 - 52
  • [2] Synthesis and properties of sol-gel derived transparent ZnO thin films: Effect of indium doping
    Keskenler, Eyup Fahri
    Turgut, Guven
    JOURNAL OF CERAMIC PROCESSING RESEARCH, 2016, 17 (12): : 1254 - 1259
  • [3] Controlling the extremely preferred orientation texturing of sol-gel derived ZnO thin films with sol and heat treatment parameters
    Ebrahimifard, Reza
    Abdizadeh, Hossein
    Golobostanfard, Mohammad Reza
    JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2020, 93 (01) : 28 - 35
  • [4] Piezoelectric properties of sol-gel derived ZnO thin films
    Bukowski, TJ
    McCarthy, K
    McCarthy, F
    Teowee, G
    Alexander, TP
    Uhlmann, DR
    Dawley, JT
    Zelinski, BJJ
    INTEGRATED FERROELECTRICS, 1997, 17 (1-4) : 339 - 347
  • [5] Thickness effect on luminescent properties of sol-gel derived ZnO thin films
    Chia, C. H.
    Tsai, W. C.
    Chiou, J. W.
    JOURNAL OF LUMINESCENCE, 2013, 136 : 160 - 164
  • [6] Effect of preheating process on crystallization and optical properties of sol-gel derived ZnO semiconductor thin films
    Tsay, Chien-Yie
    Fan, Kai-Shiung
    Chen, Chin-Yi
    Wu, Jyh-Ming
    Lei, Chien-Ming
    JOURNAL OF ELECTROCERAMICS, 2011, 26 (1-4) : 23 - 27
  • [7] Microstructural evolution of sol-gel derived ZnO thin films
    Miller, James B.
    Hsieh, Hsin-Jung
    Howard, Bret H.
    Broitman, Esteban
    THIN SOLID FILMS, 2010, 518 (23) : 6792 - 6798
  • [8] Effect of thermal treatment on the properties of sol-gel derived Al-doped ZnO thin films
    Musat, V
    Teixeira, B
    Fortunato, E
    Monteiro, RCC
    Vilarinho, P
    ADVANCED MATERIALS FORUM II, 2004, 455-456 : 16 - +
  • [9] Effect of sol concentration on the properties of ZnO thin films prepared by sol-gel technique
    Dutta, M.
    Mridha, S.
    Basak, D.
    APPLIED SURFACE SCIENCE, 2008, 254 (09) : 2743 - 2747
  • [10] Preparation and characterization of ZnO transparent semiconductor thin films by sol-gel method
    Tsay, Chien-Yie
    Fan, Kai-Shiung
    Chen, Sih-Han
    Tsai, Chia-Hao
    JOURNAL OF ALLOYS AND COMPOUNDS, 2010, 495 (01) : 126 - 130