Adaptive Threshold Processing of Secondary Electron Images in Scanning Electron Microscope

被引：0

作者：

Bian, Weiguo ^{[1
]}

Wang, Mingyu ^{[1
]}

Yang, Zhan ^{[1
]}

机构：

[1] Soochow Univ, Sch Mech & Elect Engn, Suzhou 215123, Peoples R China

来源：

INTELLIGENT ROBOTICS AND APPLICATIONS, ICIRA 2019, PT I | 2019年 / 11740卷

基金：

国家重点研发计划;

关键词：

SEM; Secondary electron images; Adaptive threshold; Gray histogram; Binarization;

D O I：

10.1007/978-3-030-27526-6_15

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

Observing the sample under a scanning electron microscope (SEM) requires adjustment of brightness and contrast to obtain a clear image. The traditional method is manually adjusted by the operator, which inevitably has errors. In this paper, an adaptive threshold processing method based on image-based normalized gray histogram is proposed. This method can acquire the threshold of the image according to the state of the currently obtained secondary electron images. When the brightness and contrast of the image change, the threshold can also be changed accordingly. It is concluded from a large number of tests that when the secondary electron image gray histogram has obvious double peaks and is located in the trough, the threshold obtained is optimal. Therefore, it is possible to better observe the pictures under the SEM.

引用

页码：166 / 173

页数：8

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