Sheath analysis in collisional electronegative plasmas with finite temperature of positive ions

被引：17

作者：

Fernandez Palop, J. I. ^{[1
]}

Ballesteros, J. ^{[1
]}

Morales Crespo, R. ^{[1
]}

Hernandez, M. A. ^{[1
]}

机构：

[1] Univ Cordoba, Dept Fis, E-14071 Cordoba, Spain

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2008年 / 41卷 / 23期

关键词：

D O I：

10.1088/0022-3727/41/23/235201

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The sheath which occurs in front of a plane metallic surface immersed in an electronegative plasma is analysed taking into account the positive ion collisions and thermal motion. Collisions do not affect the equations of the sheath but have a significant influence on the initial conditions, which are obtained from the plasma solution. The combined influence of collisions and positive ion thermal motion on the sheath, the sheath thickness, the positive ion saturation current and the floating potential is analysed.

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页数：7

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