Rf power absorption and antenna impedance in an m=0 helicon plasma source

被引:2
作者
Shamrai, KP [1 ]
Pavlenko, VP [1 ]
机构
[1] UNIV UPPSALA,DEPT TECHNOL,S-75121 UPPSALA,SWEDEN
来源
PHYSICA SCRIPTA | 1997年 / 55卷 / 05期
关键词
D O I
10.1088/0031-8949/55/5/014
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The excitation of waves and wave power release are considered in a helicon plasma source driven by an axially-symmetric m = 0 antenna. The volume power input via helicon waves is shown to be enhanced and more peaked near the plasma axis as compared with the case of a source driven by an axially anti-symmetric antenna. The resistance of the antenna loaded by the wave excitation is found to minimize near antiresonance states which provides the condition for a helicon discharge stability.
引用
收藏
页码:612 / 616
页数:5
相关论文
共 20 条
[1]  
ALEKSANDROV AF, 1994, ZH TEKH FIZ+, V64, P53
[2]  
BOSWELL RW, 1984, PLASMA PHYS CONTR F, V26, P1147, DOI 10.1088/0741-3335/26/10/001
[3]   EXPERIMENTS ON HELICON PLASMA SOURCES [J].
CHEN, FF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04) :1389-1401
[4]   RF PRODUCTION OF HIGH-DENSITY PLASMAS FOR ACCELERATORS [J].
CHEN, FF .
LASER AND PARTICLE BEAMS, 1989, 7 :551-559
[5]   THE ABSORPTION MECHANISMS OF WHISTLER WAVES IN COOL, DENSE, CYLINDRICALLY BOUNDED PLASMAS [J].
HARVEY, BM ;
LASHMOREDAVIES, CN .
PHYSICS OF FLUIDS B-PLASMA PHYSICS, 1993, 5 (11) :3864-3875
[6]  
JIWARI N, 1993, JPN J APPL PHYS, V32, P1930
[7]   HELICON ION-SOURCE FOR PLASMA PROCESSING [J].
KATYUKHA, VP ;
KIRICHENKO, GS ;
RUSAVSKII, AV ;
TARANOV, VB ;
SHAMRAI, KP .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (04) :1368-1370
[8]   RF DISCHARGE IN THE FIELDS OF PLASMA RESONATOR EIGENMODES [J].
KIRICHENKO, GS ;
TARANOV, VB ;
SHAMRAI, KP ;
YAGOLA, VV .
PHYSICS LETTERS A, 1994, 191 (1-2) :167-170
[9]   Etching characteristics in helicon wave plasma [J].
Kitagawa, Hideo ;
Tsunoda, Akira ;
Shindo, Haruo ;
Horiike, Yasuhiro .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1993, 2 (01) :11-13
[10]   HELICON WAVES AND EFFICIENT PLASMA PRODUCTION [J].
KOMORI, A ;
SHOJI, T ;
MIYAMOTO, K ;
KAWAI, J ;
KAWAI, Y .
PHYSICS OF FLUIDS B-PLASMA PHYSICS, 1991, 3 (04) :893-898