A high-resolution displacement sensor based on a grating interferometer with the phase modulation technique

被引：18

作者：

Zhao, Shuangshuang ^{[1
]}

Hou, Changlun ^{[1
]}

Zhang, Juan ^{[1
]}

Bai, Jian ^{[1
]}

Yang, Guoguang ^{[1
]}

机构：

[1] Zhejiang Univ, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 2012年 / 23卷 / 10期

基金：

中国国家自然科学基金;

关键词：

displacement sensor; grating interferometer; phase modulation technology (PMT); ACCURACY;

D O I：

10.1088/0957-0233/23/10/105102

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A high-resolution displacement sensor based on a grating interferometer with the phase modulation technique is demonstrated in this paper. The grating interferometer is formed with a grating and a mirror, which is fixed on a piezoelectric translator to generate phase modulation. The detected signal is intensity-modulated and processed with a lock-in amplifier for demodulation. Experimental results show that this displacement sensor has a displacement sensitivity of 19.8 mV nm(-1) and a high-resolution displacement detection of 0.05 nm in the linear region.

引用

页数：6

共 11 条

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