共 50 条
- [32] FOCUSED ION-BEAM INDUCED DEPOSITION IN THE HIGH-CURRENT DENSITY REGION JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (11B): : 3233 - 3237
- [33] Minimizing damage during focused-ion-beam induced desorption of hydrogen JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (06): : 2443 - 2446
- [35] NEAR-SURFACE CONTAMINATION OF SILICON DURING REACTIVE ION-BEAM ETCHING WITH CHLORINE JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (04): : 812 - 817
- [37] Focused Ion Beam Induced Surface Damage Effect on the Mechanical Properties of Silicon Nanowires JOURNAL OF ENGINEERING MATERIALS AND TECHNOLOGY-TRANSACTIONS OF THE ASME, 2013, 135 (04):
- [38] Silicon nitride films produced by ion-beam assisted deposition: Bulk and near-surface composition NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1996, 108 (1-2): : 85 - 86
- [40] Characterization of deposited materials formed by focused ion beam-induced chemical vapor deposition using an AuSi alloyed metal source MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS, 2007, : 150 - +