Possibility of nondestructive layer-by-layer analysis of multilayer structures of ultrathin films using low-energy hydrogen ions

被引：1

作者：

Kurnaev, VA ^{[1
]}

Trifonov, NN ^{[1
]}

Drozdov, MN ^{[1
]}

Salashchenko, NN ^{[1
]}

机构：

[1] Moscow Engn Phys Inst, Moscow 115409, Russia

来源：

TECHNICAL PHYSICS LETTERS | 1999年 / 25卷 / 06期

基金：

俄罗斯基础研究基金会;

关键词：

Hydrogen; Energy Spectrum; Multilayer Structure; Ultrathin Film; Nondestructive Monitoring;

D O I：

10.1134/1.1262510

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The possibility of nondestructive monitoring of the distribution of the composition in multilayer structures was investigated experimentally by analyzing the energy spectra of scattered hydrogen ions. (C) 1999 American Institute of Physics. [S1063-7850(99)00906-4].

引用

页码：442 / 443

页数：2

共 7 条

[1] HIGH-RESOLUTION AUGER DEPTH PROFILING OF MULTILAYER STRUCTURES MO/SI, MO/B4C, NI/C [J].

ANDREEV, SS ;

AKHSAKHALYAN, AD ;

DROZDOV, MN ;

POLUSHKIN, NI ;

SALASHCHENKO, NN .

THIN SOLID FILMS, 1995, 263 (02) :169-174

[2]

DROZDOV MN, 1997, POVERKHNOST, V11, P57

[3]

Eckstein W., 1991, COMPUTER SIMULATION

[4]

FEURSTEIN A, 1975, ION BEAM SURFACE LAY, P471

[5]

Koborov N.N., 1977, NUCL INSTRUM METHODS, VB129, P5

[6]

KURNAEV VA, 1985, SCATTERING LIGHT ION

[7]

WOODRUFFE CP, 1986, MODERN TECHNIQUES SU

← 1 →