Structural, optical and electrical properties of tin oxide thin films by electrostatic spray deposition

被引：13

作者：

Joshi, Bhavana N. ^{[1
]}

Yoon, Hyun ^{[1
]}

Yoon, Sam S. ^{[1
]}

机构：

[1] Korea Univ Anam Dong, Sch Mech Eng, Seoul 136713, South Korea

来源：

JOURNAL OF ELECTROSTATICS | 2013年 / 71卷 / 01期

关键词：

Electrostatic spray deposition; SnO2; Electrical resistivity; SNO2; FABRICATION;

D O I：

10.1016/j.elstat.2012.11.024

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Tin oxide (SnO2) thin films were deposited by electrostatic spray deposition (ESD). The structural, optical and electrical properties of the films for different solvents were studied. The morphology of the deposited thin films was investigated by scanning electron microscopy. The optical transmission spectra of the films showed 66-75% transmittance in the visible region of spectrum. The electrical resistivity of thin films deposited using the different solvents ranged 1.08 x 10(-3)-1.34 x 10(-3) Omega-cm. Overall, EG and PG were good solvents for depositing SnO2 thin films by the ESD technique with stable cone jet. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：48 / 52

页数：5

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