ZnS wide band gap semiconductor thin film electronic structure sensitivity to Mn impurity

被引:28
作者
Vdovenkova, T
Vdovenkov, A
Tornqvist, R
机构
[1] Kyiv T Shevchenko Univ, Radiophys Fac, UA-252017 Kiev 17, Ukraine
[2] Res & Dev Inst Microdevices, Kiev, Ukraine
[3] Planar Int Ltd, FIN-02201 Espoo, Finland
关键词
electronic structure; impurities; X-ray photoelectron spectroscopy;
D O I
10.1016/S0040-6090(98)01596-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this work the Mn influence on X-ray photoelectron Zn 2p and S 2p spectra of ZnS thin films with low Mn concentration have been studied. The careful analysis of Zn 2p and S 2p spectra shows that the Mn impurity in concentration less than sensitivity limit of XPS leads to the decreasing binding energy for Zn 2p electrons on 0.3 eV and for S 2p electrons on 0.6 eV. It was explained by elementary Zn clusters formation for similar to 7 at.% of Zn atoms and by changing the Zn-S-Zn groups on the Mn-S-Mn groups for similar to 5 at.% of S atoms. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:332 / 334
页数:3
相关论文
共 9 条
[1]  
BRIGGS D, 1987, PRACTICAL SURFACE AN, P133
[2]   XPS AND STS OF LAYERED SEMICONDUCTOR MOSX [J].
BUZANEVA, E ;
VDOVENKOVA, T ;
GORCHINSKY, A ;
SENKEVICH, A ;
NEMOSHKALENKO, V ;
KLEIN, A ;
TOMM, Y .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1994, 68 :763-769
[3]   SEPARATING GROUND-STATE AND SCREENING CONTRIBUTIONS TO CHEMICAL-SHIFTS [J].
COLE, RJ ;
WEIGHTMAN, P .
JOURNAL OF PHYSICS-CONDENSED MATTER, 1994, 6 (29) :5783-5790
[4]  
NEFEDOV VI, 1984, XRAY PHOTOELECTRON S, P165
[5]  
NINISTO L, 1997, ANN CHIM, V87, P221
[6]  
Seah M. P., 1979, Surface and Interface Analysis, V1, P2, DOI 10.1002/sia.740010103
[7]  
SEIGBAHN K, 1971, ESCA ATOMIC MOL SOLI, P1789
[8]   EMPIRICAL ATOMIC SENSITIVITY FACTORS FOR QUANTITATIVE-ANALYSIS BY ELECTRON-SPECTROSCOPY FOR CHEMICAL-ANALYSIS [J].
WAGNER, CD ;
DAVIS, LE ;
ZELLER, MV ;
TAYLOR, JA ;
RAYMOND, RH ;
GALE, LH .
SURFACE AND INTERFACE ANALYSIS, 1981, 3 (05) :211-225
[9]   AUGER ELECTRON SPECTROSCOPY - A LOCAL PROBE FOR SOLID SURFACES [J].
Weissmann, R. ;
Mueller, K. .
SURFACE SCIENCE REPORTS, 1981, 1 (05) :251-309