Measurement of the roughness parameters with the use of an interference microscope

被引：1
|
作者：
Moiseev, N. N. [1 ]
Tselmina, I. Yu. [2 ]
机构：
[1] All Russia Res Inst Optophys Measurements VNIIOFI, Moscow, Russia
[2] Ramenskoe Instrument Construct Factory, Ramenskoye, Russia
来源：
MEASUREMENT TECHNIQUES | 2012年 / 55卷 / 09期
关键词：
Linnik interference microscope; phase steps methods; roughness; laser mirror;
D O I：
10.1007/s11018-012-0087-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A technique for the measurement of the roughness parameters of a polished surface in the nanometric range (nano-roughness) by means of a Linnik interference microscope with computer-aided interpretation of the interference patterns using the phase steps method is considered.
引用
收藏
页码：990 / 994
页数：5
相关论文
共 50 条
  • [41] Use of roughness maps in visualisation of surfaces
    Seitavuopio, P
    Rantanen, J
    Yliruusi, J
    EUROPEAN JOURNAL OF PHARMACEUTICS AND BIOPHARMACEUTICS, 2005, 59 (02) : 351 - 358
  • [42] Significant Parameters for the Surface Roughness in Incremental Forming Process
    Echrif, Salah B. M.
    Hrairi, Meftah
    MATERIALS AND MANUFACTURING PROCESSES, 2014, 29 (06) : 697 - 703
  • [43] A numerical study of the statistics of roughness parameters for fluctuating interfaces
    Bustingorry, S.
    Guyonnet, J.
    Paruch, P.
    Agoritsas, E.
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2021, 33 (34)
  • [44] Roughness parameters and surface deformation measured by "coherence radar"
    Ettl, P
    Schmidt, B
    Schenk, M
    Laszlo, I
    Hausler, G
    INTERNATIONAL CONFERENCE ON APPLIED OPTICAL METROLOGY, 1998, 3407 : 133 - 140
  • [45] Predictability of Microbial Adhesion to Dental Materials by Roughness Parameters
    Schubert, Andrea
    Wassmann, Torsten
    Holtappels, Mareike
    Kurbad, Oliver
    Krohn, Sebastian
    Buergers, Ralf
    COATINGS, 2019, 9 (07)
  • [46] INFLUENCE OF THE PROCESS PARAMETERS ON THE SURFACE ROUGHNESS OF SPIFed PARTS
    Radu, Crina
    MODTECH 2012: NEW FACE OF T M C R, VOLS I AND II, 2012, : 829 - 832
  • [47] Correlation analysis of the roughness as function of cutting speed and feed rate (the roughness as function of machining parameters)
    Pereira Rodrigues, Jean Robert
    Goncalves, Rubens Soeiro
    Araujo Junior, Antonio Santos
    de Meneses Barros, Joao Luis
    Andrade Cunha, Adilto Pereira
    Francisco do Nascimento, Carmen Celia
    ACTA SCIENTIARUM-TECHNOLOGY, 2019, 41
  • [48] The effect of roughness in simultaneously retrieval of land surface parameters
    Moradizadeh, Mina
    Saradjian, Mohammad R.
    PHYSICS AND CHEMISTRY OF THE EARTH, 2016, 94 : 127 - 135
  • [49] RESEARCH OF THE HORIZONTAL PARAMETERS OF THE ROUGHNESS MACHINED SURFACE BY TURNING
    Salihu, Avdi
    Zeqiri, Hakif
    Bunjaku, Avdyl
    Qehaja, Nexhat
    Osmani, Hysni
    Kycyku, Azem
    ANNALS OF DAAAM FOR 2009 & PROCEEDINGS OF THE 20TH INTERNATIONAL DAAAM SYMPOSIUM, 2009, 20 : 119 - 120
  • [50] Influence of surface preparation on roughness parameters, friction and wear
    Sedlacek, M.
    Podgornik, B.
    Vizintin, J.
    WEAR, 2009, 266 (3-4) : 482 - 487
12345