Formation of Sb submonolayer phases on high index Si(5512) surface

被引:22
作者
Kumar, M [1 ]
Paliwal, VK [1 ]
Joshi, AG [1 ]
Govind [1 ]
Shivaprasad, SM [1 ]
机构
[1] Natl Phys Lab, Surface Phys & Nanostruct Grp, New Delhi 110012, India
关键词
antimony; Si(5512); high index surfaces; metal-semiconductor interfaces; epitaxy; low energy electron diffraction; Auger electron spectroscopy; electron energy loss spectroscopy;
D O I
10.1016/j.susc.2005.09.017
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
This work is the first report on the submonolayer adsorption of antimony (Sb) on the high index Si(5 5 12) surface, studied in UHV by in situ surface sensitive probes such as Auger electron spectroscopy (AES), electron energy loss spectroscopy (EELS), and low energy electron diffraction (LEED). The Auger growth curve which is a plot of the Sb(MNN)/Si(LVV) Auger peak intensity ratio with deposition time, provides a calibration of a deposition rate of 0.06 ML/min. A coverage of 0.2 ML is obtained by four different routes (a) adsorption at room temperature (RT), (b) adsorption at high substrate temperature (HT) of 680 degrees C, (c) annealing the RT adsorbed surface to 800 degrees C and (d) annealing the high substrate temperature (680 degrees C) adsorbed surface to 800 degrees C. The (2 2 5) facets are observed for the RT adsorbed system at coverage of 0.2 ML, while the pathway adopted to attain the 0.2 ML coverage by adsorption at elevated temperature shows two different atomic arrangements in the formation of the (337) facets. The HT adsorbed surface suggests the formation of nano-wire-like features while the 0.2 ML coverage obtained by annealing the HT as well as RT adsorbed surface suggests an anisotropic Sb atomic arrangement. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:206 / 211
页数:6
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