Thickness Dependent Dielectric Tunable Properties of Barium Strontium Titanate Thin Films

被引：1

作者：

Yadava, Anil K. ^{[1
]}

Reddy, V. Annapu ^{[1
]}

Sharma, Vivek ^{[2
]}

Pathak, N. P. ^{[2
]}

Nath, R. ^{[1
]}

机构：

[1] Indian Inst Technol, Dept Phys, Ferroelect Mat & Devices Res Lab, Roorkee 247667, Uttarakhand, India

[2] IIT Roorkee, Dept Elect & Comp Engn, Rad Frequency Integrated Circuits Res Lab, Roorkee 247667, Uttar Pradesh, India

来源：

PROCEEDING OF INTERNATIONAL CONFERENCE ON RECENT TRENDS IN APPLIED PHYSICS & MATERIAL SCIENCE (RAM 2013) | 2013年 / 1536卷

关键词：

tunability; figure of merit; thickness;

D O I：

10.1063/1.4810322

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thickness is a very important parameter to control the microstructures, as well as dielectric properties in the Ba0.5Sr0.5TiO3 thin films. Ba0.5Sr0.5TiO3 films with various thicknesses were deposited on Si substrate by chemical solution method. An increase in the grain size as the film thickness increased was observed. The improvement dielectric tunable properties with film thickness were observed and were correlated to the structural properties.

引用

页码：505 / +

页数：2

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