Temperature Model for a Vacuum Packaged MEMS Gyroscope Structure

The influence of temperature's variation upon the resonant frequency and damping of the Micro-Electro- Mechanical-System (MEMS) gyroscope's silicon structure in the vacuum package is investigated in this article. The gyroscope's working principle and the dual-mass decoupled gyroscope structure are introduced, the drive and sense modes' frequencies are analyzed. The ideal models of resonant frequency and damping are established and the dominate elements of impacting the resonant frequency and damping are Young Modulus, air viscosity coefficient and ambient pressure respectively. The experiments and the results proved that the frequency model works well, and the damping model only can simulate the tendency because of the air getter's influence.