The Poisson's equation and the drift diffusion equations have been used to simulate the currentvoltage characteristics of Schottky diode. The potential variation inside the bulk semiconductor near the metalsemiconductor contact was estimated first and then the current as a function of bias through the Schottky diode using silicon parameters were calculated over a wide temperature range. From the simulated currentvoltage characteristics the diode parameters were extracted by fitting of currentvoltage data into thermionic emission diffusion current equation. The derived barrier parameters are analysed to study the effect of various parameters, e.g. semiconductor thickness, doping concentration, temperature dependence of carrier mobility and energy band gap, on the currentvoltage characteristics of Schottky diode in view of the thermionic emission diffusion current equations.