Chemical modifications in femtosecond ultraviolet (248 nm) excimer laser radiation-processed polyimide

被引：29
作者：
Adhi, KP
Owings, RL
Railkar, TA [1 ]
Brown, WD
Malshe, AP
机构：
[1] Univ Arkansas, Dept Mech Engn, Mat & Mfg Res Labs, Fayetteville, AR 72701 USA
[2] Univ Arkansas, Dept Elect Engn, Fayetteville, AR 72701 USA
[3] Skyworks Solut Inc, Adv Packaging, Irvine, CA 92612 USA
[4] Univ Pune, Dept Phys, Pune 411007, Maharashtra, India
来源：
APPLIED SURFACE SCIENCE | 2004年 / 225卷 / 1-4期
基金：
美国国家科学基金会;
关键词：
ultrafast laser; excimer laser; laser material processing; polyimide kapton;
D O I：
10.1016/j.apsusc.2003.10.034
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Using X-ray photoelectron spectroscopy.(XPS), we have investigated the surface of polyimide (kapton), which was subjected to processing by femtosecond UV radiation from an excimer laser (KrF: lambda = 248 nm, t(p) similar to 380 fs) in air. Significant variations were observed in the C 1s and O 1s spectra of the processed surface of kapton, indicating chemical modifications due to loss of volatile groups such as C=O and C-N. Incorporation of oxygen via bonding as C-O-C of the aromatic rings was observed during processing. Bulk characterization of the processed kapton by Fourier transform infrared spectroscopy (FTIR) allowed a study of laser-induced modifications in the material at energy densities below the ablation threshold. Scanning electron microscopy (SEM) studies of the surface morphology of the processed zone of kapton indicates mechanically clean and damage-free processing with good edge quality. (C) 2003 Elsevier B.V. All rights reserved.
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页码：324 / 331
页数：8
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