Arbitrary Structures Fabricated by Focused Ion Beam Milling

被引:0
|
作者
Jiang, Xiaoxiao [1 ]
Wang, Fengwen [1 ]
Ma, Zhenhe [1 ]
Gu, Qiongchan [1 ]
Lv, Jiangtao [1 ]
Si, Guangyuan [1 ]
机构
[1] Northeastern Univ, Sch Control Engn, Qinhuangdao 066004, Peoples R China
关键词
Nanodevices; arbitrary shapes; focused ion beam; NIOBATE PHOTONIC CRYSTAL; LITHIUM-NIOBATE; WAVE-GUIDES;
D O I
10.4028/www.scientific.net/AMR.661.66
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Optical components at the nanoscale are crucial for developing photonics and integrated optics. Device with ultrasmall dimensions is of particular importance for nanoscience and electronic technology. Among all the manufacturing tools, the focused ion beam is a critical candidate for machining and processing optical devices at the nanoscale. Here, we experimentally demonstrate the fabrication of nanodevices with arbitrary shapes and different potential applications using focused ion beam techniques.
引用
收藏
页码:66 / 69
页数:4
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